Speaker details

Suvi Haukka

Dr. Suvi Haukka is currently working as Executive Scientist for ALD applications at ASM Microchemistry which is a research company owned by ASM International, a global company that together with its subsidiaries designs and manufactures equipment and materials used to produce semiconductor devices. In 1990 Suvi Haukka joined Microchemistry to carry out her PhD studies on the atomic layer by atomic layer growth. After completing her PhD in 1993 she worked at Microchemistry first as Research Scientist and later as Department Manager. At ASM Microchemistry after ASM International acquired Microchemistry in 1999 she was first responsible for the ALD process development and later for the ALD technology development until the end of 2001. Dr. Haukka has authored and co-authored over 50 technical publications, is inventor of more than 40 patents (27 issued US patents) and other pending applications related to ALD. Dr. Haukka holds an MSc and PhD in Chemistry from the University of Helsinki (Finland).